GDSHelpers is an open-source package for automatized pattern generation for nano-structuring.
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Updated
May 25, 2022 - Python
GDSHelpers is an open-source package for automatized pattern generation for nano-structuring.
Github repository to share some insights about lithography simulation.
Differentiable Computational Lithogrpahy Framework
From Qiskit Metal to pattern generation to real nanofabrication demo. Here, quantum devices on a chip are patterned via direct-write electron-beam lithography in a nanofabrication facility. Written & patterned by Onri Jay Benally, an Indigenous American quantum hardware engineer.
Practical example from the SPIE short course "Data Analytics and Machine Learning in Semiconductor Manufacturing: Applications for Physical Design, Process and Yield Optimization"
Generate ASCII Job files for an ASML PAS 5500 Stepper Lithography system, by the UCSB Nanofabrication Facility.
MATLAB tools for Raith electron-beam lithography (EBL) and focused ion beam (FIB) systems — Outils MATLAB pour les systèmes Raith de lithographie par faisceau d'électrons et de faisceau d'ions focalisés
This is a comprehensive MATLAB-based software platform developed for real-time measurement and feedback control of a custom mask-projection photopolymerization based additive manufacturing system (referred as "ECPL", i.e., Exposure Controlled Projection Lithography) using a lab-built interferometry (referred as "ICM&M", i.e., Interferometric Cur…
MATLAB tools for Raith electron-beam lithography (EBL) and focused ion beam (FIB) systems — Outils MATLAB pour les systèmes Raith de lithographie par faisceau d'électrons et de faisceau d'ions focalisés
EE6601 Advanced Wafer Processing
Lithography defect prediction for microchip manufacturing optimization with machine learning model
We use MixedWM38, the mixed-type wafer defect pattern dataset for wafer defect pattern regcognition with visual transformers.
Software for controlling the temperature of a self-heating AFM cantilever
Desktop app for lithography learning available for Windows, macOS, and Linux
Matlab GUI for manually tracing outlines of images
A model that can be plugged into a bigger model by T. Verduin. This model is able to simulate e-beam lithography, and this particular model implements the effect of bondbreaking in PMMA (plastic). This model has been done as part of the Bachelor thesis of Mels Habold for at ImPhys at Delft University of Technology in 2019.
Lithography Equipment Emulator
Maskless photolithography system targeting 5um resolution. Open hardware design.
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